TSMC Outlines Path to EUV Success: More Tools, More Wafers, & Best Pellicles In Industry
Although TSMC can’t claim to be the first fab to use extreme UV (EUV) lithography – that title goes to Samsung – they do get to claim to be the largest. As a result, the company has developed significant experience with EUV over the years, allowing TSMC to refine how they use EUV tooling to…
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